The Star Wars aliens, like those in Babylon 5, Star Trek and Doctor Who. are actually characters, with dialogue, complex motivations and reactions. The Same applies to Hensons' mixture of costuming and puppetry in Labyrinth or The Dark Crystal.
That said, Godzilla and other kaiju or daikaiju, are colossal monsters. In stop-motion, or (dare I mention it) modern CGI, theywold and do look like colossal monsters. But in most of the 'classic' Toho films, they look like men in suits running around miniature landscapes. Fun in a simple-minded way, but I could never stop wishing for something better.